MEMS2008: Japan succeeds in developing the miniature wind speed sensor
The department of information science and engineering of graduate school of Tokyo University studies department's professor and goes down the hill in the research group of the merit and succeeds in developing and can be installed on wing of insects such as the dragonfly,etc., can analyze the miniature wind speed sensor of wing movements, and learn " MEMS2008 " in MEMS world (U.S.A. Arizona State Tucson, January 13th, 08 - the 17th) Have and combine demonstrating live that has paid issuing. The sensor size of miniature wind speed that this group develops is about 3mm square, the thickness is about 1mm. Having allocated 2 sensors on the chip 3mm square, the size of each sensor is about 1.5mm * 3mm. Go down the hill in the research group while developing MEMS, study the movements of the insect. This great to study insect's active influence in these research room while being gentle in professional the intersection of professor and three Pu in engineering in the intersection of department and mechanical information former the intersection of Tokyo University and worker. The development purpose of this sensor is to apply MEMS technology to the movements of the insect while analyzing. The sensor adopts the cantilever beam (cantilever) that the shape becomes long under about 0.5mm, thick 1μ m on SOI bottom panel with electrode Structure of piezoresistance. Piezoresistance adopts the Si semiconductor, when the wind blows to the cantilever, the cantilever is produced and met an emergency, this one will make the resistance change to meet an emergency, will receive the number value out of shape in this way, and then obtained the intension value of wind. The partial weight of the cantilever is only 0.1μ g. The characteristic of the sensor, has already confirmed that can realize the goal that before this - -Measure - wind speed of 2m/s- 2m/s. Have been afraid that has shaken while mounting the sensor onto one second on the wings for several times from head to foot before this, the cantilever will produce the noise because of acceleration of wings. And reduced its influence to 3 of measured value this time- 10% (5% of standard) ,Confirmed real application OK. "sensor resonance ( Inherent) The frequency is above 10Hz, (but the speech for counting the wing vibration frequency of Hz) Not basically influenced " (mountain plays the research group to release to personnel) Insect and MEMS become one of the subjects On MEMS2008 this time, besides above-mentioned achievement, several release research results of applying in insect's research MEMS. Especially noticeable issue is, the technology of install electrodes, similar remote control toy like that on the basis of Copper chippings scarab and nerve of the moth and is controlledding (on January 17) . The American research institution of Ministry of National Defence " Defence Advanced Research Projects Agency (DARPA) " Robot plan " HybridInsectMEMS (HI-MEMS) that the ones that announced the insect in 07 allowed " . This aid regarding the research of Copper chippings scarab and moth has got DARPA.