Jul 28, 2022
Sputtering Target Selection for SEM Sample Preparation
Sputter coating has been widely used in SEM sample preparation to make non-conductive SEM sample conductive. To achieve optimal SEM performance, it is critical to control sputter coating quality which is affected by target material, interaction with sample and process parameters. In this article, selection guides for target materials will be discussed. This information is only valid for modern DC magnetron SEM sputter coater.
Sputter coating has been widely used in SEM sample preparation to make non-conductive SEM sample conductive. To achieve optimal SEM performa