KLA-TENCOR puts out the brand-new control chip and measures the system SURFSCAN SP2XP
A few days ago, KLA-Tencor Company put out Surfscan® SP2XP, this is that one set specializes in integrated circuit (IC) It adopt market brand-new for control chip detection system,introduce and not highly successful system in crystal plate manufacture market last year sisters machine develop. Brand-new Surfscan SP2XP is higher to the flaw sensitivity on silicon, polycrystalline silicon and metal film, and compared with its previous generation's products Surfscan SP2 with leading industry, have stronger ability according to defective type and magnitude. Its characteristic also includes the vacuum bears the weight of the device and optimal operational capacities of industry. These functions are to offer the remarkable machine of process for preparing to control and design in the crystal plate factory for chip manufacturers, enable it lead (& ge; 4Xnm) The component is introduced to the market more quickly. The new system is offered the ultra highly sensitive mode of operation, can accelerate the development to the components of future generation of 3Xnm and 2Xnm of crystal plate factory.
Executive vice president and concurrently chief manager Mike Kirk that KLA-Tencor crystal plate measures the group show: " The manufacturers of the high-performance component realize the complexity of the process for preparing of the chip increases day by day, window one was shortened day by day too in the cities of these components at the same time, Surfscan SP2XP system solved and detected their demands that is causing too many defects of the machine of process for preparing fast, and revise this question under losing in minimum crystal plate condemnation factor, high quality ratio and delaying on the market. Our new machine can solve this challenge, not merely promote to some extent in degree of sensitivity and productivity, and introduce the function of distinguishing out the particle from microscratch and residue, do not need to consume the resources that SEM examined again. We are deeply convinced, Surfscan SP2XP will help the crystal plate factory to accelerate the production of its advanced component. "
Having improved the designs of optical machinery and SIGPROC signal processing, it is for guaranteeing that be able to catch on the crystal plate of grain side, even the slightest defect on and forward end and rear end membrane. Multi-channel framework and innovative algorithm of the sole, patent, let Surfscan SP2XP system distinguish the defective type automatically. Compared with previous generation's leading in trade Surfscan SP2 products, this machine also has remarkable productivity, let the crystal plate factory measure the multiple chip per hour, or use high more sensitive arrangement, and will not reduce its productivity. Surfscan SP2XP inherits the consistent reputation of this platform, has extremely good reliability, ease of use and system.
Because the whole industry has dense thick interests to Surfscan SP2XP system, we have already got the Apparatus manufacturers of crystal plate factory from Asia, U.S.A. and Europe, and leading logical circuit and memory take the place of the multiple orders of the factory. The edge that we released the specialized Surfscan SP2XP system of market of factory's manufacture of the crystal plate in January of 2007 bears the weight of the device edition, and obtained the extensive approval of the market rapidly, each leading crystal plate manufacturer has installed a plurality of this system. Technological summary
Because has improved in machinery, optics and SIGPROC signal processing subsystem, Surfscan SP2XP control chip detection system has the advantage of being multiple compared with its previous generation's leading in trade Surfscan SP2 products. These advantages include:
· It is promoted by 36% that the productivity is the highest, this will give the credit to the comprehensive improvement of the optical machinery, electron and software.
· The multi-channel framework of the sole, patent, let Surfscan SP2XP system distinguish the particle from the microscratch, space, watermark and other residues automatically.
· Introduce the ultra highly sensitive mode, let Surfscan SP2XP system used in the development of the chip of future generation.
· Optical machinery innovates the detection sensitivity of the defect on the coarse membrane of polycrystalline silicon, tungsten and copper of pair of stations,etc. of the strengthening machine. Combine this platform to the reference sensitivity on the smooth membrane, this brand-new function lets Surfscan SP2XP platform use in the whole crystal plate factory, bring potential improvement for the business efficiency of the crystal plate factory.
· Adopt the brand-new differential to interfere phase difference (DIC) Channel, can catch get shallow flat light key defect, residue or raise a bit, all these defects may cause the component trouble, especially advanced component.
