EE6007 Micro Electro Mechanical Systems - MEMS
Intrinsic Characteristics of MEMS – 1.2
Energy Domains and Transducers – 1.3.1
Sensors and Actuators – 1.3
Introduction to Micro fabrication – 2.1
Silicon based MEMS processes – 2.4
Review of Electrical and Mechanical concepts in MEMS – 3.0
Semiconductor devices – 3.1
Stress and strain analysis – 3.3
Flexural beam bending – 3.4
Torsional deflection – 3.5
UNIT II SENSORS AND ACTUATORS-I 9
Electrostatic sensors – 4.1
Parallel plate capacitors – 4.2
Interdigitated Finger capacitor – 4.4
Thermal Sensing and Actuation – 5.0
Micromagnetic components – 8.2
Case studies of MEMS in magnetic actuators- 8.3
Actuation using Shape Memory Alloys -
UNIT III SENSORS AND ACTUATORS-II 9
Piezoresistive sensors – 6.2
Piezoresistive sensor materials – 6.2
Stress analysis of mechanical elements – 6.3
Applications to Inertia, Pressure, Tactile and Flow sensors – 6.4
Piezoelectric sensors and actuators – 7.0
piezoelectric effects – 7.1.2
piezoelectric materials – 7.2
Applications to Inertia , Acoustic, Tactile and Flow sensors – 7.3
Silicon Anisotropic Etching –
Anisotrophic Wet Etching – 10.2
Dry Etching of Silicon – 10.3
Deep Reaction Ion Etching (DRIE) –
Isotropic Wet Etching – 10.4
Gas Phase Etchants – 10.5
Basic surface micro machining processes – 11.1
Structural and Sacrificial Materials – 11.2
Acceleration of sacrificial Etch – 11.3
Striction and Antistriction methods – 11.4
UNIT V POLYMER AND OPTICAL MEMS 9
Liquid Crystal Polymer (LCP) – 13.2.3
Application to Acceleration, Pressure, Flow and Tactile sensors- 13.3
Actuators for Active Optical MEMS.
Download Ebooks for MEMS:
TEXT BOOKS:
1. Chang Liu, ‘Foundations of MEMS’, Pearson Education Inc., 2012.
2. Stephen D Senturia, ‘Microsystem Design’, Springer Publication, 2000.
3. Tai Ran Hsu, “MEMS & Micro systems Design and Manufacture” Tata McGraw Hill, New Delhi, 2002.
REFERENCES:
1. Nadim Maluf,“ An Introduction to Micro Electro Mechanical System Design”, Artech House, 2000.
2. Mohamed Gad-el-Hak, editor, “ The MEMS Handbook”, CRC press Baco Raton, 2001.
3. Julian w. Gardner, Vijay K. Varadan, Osama O.Awadelkarim, Micro Sensors MEMS and Smart Devices, John Wiley & Son LTD, 2002.
4. James J.Allen, Micro Electro Mechanical System Design, CRC Press Publisher, 2005.
5. Thomas M.Adams and Richard A.Layton, “Introduction MEMS, Fabrication and Application,” Springer, 2010.
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