Key Features And Capabilities Of Nano-Profiling Afm
The NP-AFM is a nanoprofiler for analysis of features such as surface roughness and metrology of technical samples. Primary applications for the NP-AFM include process development and process control of technical samples.
Nano-Profiler AFM Overview
The NP-AFM is a complete nanoprofiler tool including everything required for scanning samples: microscope stage, electronic box, control computer, probes, manuals, and a video microscope. Samples as large as 200 mm X 200 mm X 20 mm are profiled by the NP-AFM system, and several stage options are available for many types of samples. The Nano-Profiler AFM is primarily used for routine scanning of technical samples such as wafers and disks or for nanotechnology research.
Key Features of the NP-AFM
Nano-Profiling AFM
The NP-AFM accommodates industry-standard sized probes and is used for profiling technical samples including wafers and disks in industry applications.
Standard Operating Modes
Vibrating mode is used for high resolution and soft samples, while non-vibrating mode can be used for routine scanning. Also included with the system are phase and lateral force modes.
Three Sample Stage Options
Three sample stage options can accommodate different samples with sizes as large as 200mm X 200mm X 20mm.
Linearized X, Y Piezoelectric Scanner
Piezoelectric X and Y scanners incorporate strain gauges that provide linear scans and rapid zoom-to-feature capabilities.
Direct-Drive Tip Approach
A linear motion stage is used to move the probe perpendicular to the sample. Probe angle alignment is not required, facilitating a much faster probe approach.
LabVIEW Operation
Industry standard programming environment, functions include setting scanning parameters, probe approach, frequency tuning, and displaying images in real time. Compatible with older operating systems as well.
Video Microscope
The video optical microscope in a NP-2 AFM serves three functions: aligning the laser onto the cantilever in the light lever AFM, locating surface features for scanning, and facilitating probe approach.
NP-AFM Capabilities
Visualization of Surface Features
Visualization of surface features can help understand why a process is working or not working. AFM offers extreme contrast on flat samples often encountered in industry wafers and disks for quality control and assurance.
Surface Roughness/Texture
Surface roughness measurements at the nanoscale are only possible with an atomic force microscope. With the appropriate vibration isolation enclosure, it is possible to measure surface textures under 0.1 nm.
Step-Height Measurements
The NP-AFM is a stylus profiler capable of making step height measurements from 0.3 to 500 nanometers. An included video microscope is essential for locating regions of interest for scanning.
To learn more about Atomic Force Microscopes, visit www.afmworkshop.com